Chemical-Mechanical Planarization of Semiconductor Materials - 9783642077388
New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ... Read moreabout the conditionNew: A new, unread, unused book in perfect condition with no missing or damaged pages. See the seller's listing for full details. See all condition definitionsopens in a new window or tab
This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
Product Details
10 Items
Data sheet
Type
Textbook
Author
M.R. Oliver
Format
Paperback
Language
English
Item Height
235mm
Item Width
155mm
Number of Pages
428 Pages
Item Weight
676g
Publisher
Springer-Verlag Berlin AND Heidelberg Gmbh & Co. KG
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Very good condition -A book that has been read and does not look new, but is in excellent condition. Don't have obvious damage to the book cover. No missing or damaged pages, no creases or tears, no underlining or highlighting of text, and no writing in the margins.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Very good condition -A book that has been read and does not look new, but is in excellent condition. Don't have obvious damage to the book cover. No missing or damaged pages, no creases or tears, no underlining or highlighting of text, and no writing in the margins.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
Good condition -A book that has been read, but is in good condition. Minimal damage to the book cover.The majority of pages are undamaged might be with some creasing or tearing, and pencil underlining of text. No writing in the margins, no missing pages.
€17.97
New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ... Read moreabout the conditionNew: A new, unread, unused book in perfect condition with no missing or damaged pages. See the seller's listing for full details. See all condition definitionsopens in a new window or tab
